SVCS provides solutions for nanoscience technologies in the area of CVD (Chemical Vapor Deposition) for both mass production and/or for demanding R&D or pilot project applications. The tools can be used for process development and materials growth in many areas of research including semiconductor, PV, MEMS and other nanotechnology applications. Typical processes are Annealing, Diffusion, Oxides, Nitrides, ALD, SW/MW CNT’s, Semiconductor Nanowires, Nanoparticles, Nanopillars, Graphene etc. The supporting equipment starts from gas cabinets with optional automatic change-over function for uninterrupted gas delivery, followed by gas panels for inert or purging gases. The other end of the R&D process is the exhaust media abatement systems (scrubbers). All the tools – gas cabinet, process tool and scrubber can be controlled by the same family control system making unique mesh for complex data acquisition and process control.
